22 October 2010 An AFM system with multi-mode scanning for large-area measurement
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Abstract
A novel atomic force microscope (AFM) system was constructed based on an air slide, an air spindle and a probe unit. It can carry out high-speed and large-area measurement for micro-structure surface with three scanning strategies of radial scanning, concentric scanning and spiral scanning. Using the AFM system, the micro-structure surface of a grating was measured with these scanning strategies. The measuring capability of them was researched by the experiment and the three measuring results were contrasted. The results show: compared with the other two scanning strategies, the spiral scanning mode can bring the best measuring image of the micro-structure profile, and it also spend the shortest time, it is only 50 seconds to finish scanning an circular area with 1 mm diameter.
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Yuguo Cui, Yuguo Cui, Gaifa He, Gaifa He, Yoshikazu Arai, Yoshikazu Arai, Wei Gao, Wei Gao, } "An AFM system with multi-mode scanning for large-area measurement", Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 76571N (22 October 2010); doi: 10.1117/12.865476; https://doi.org/10.1117/12.865476
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