22 October 2010 Characteristics of sensors based on MEMS grating with interdigitated comb structures
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Gratings as important spectral components have been employed in various optics applications, such as spectral analysis, filtering, dispersion compensation, sensing and so on. However, the physical structure of gratings produced by conventional technologies can not be alterable, this limits their applications under some specific requirements. Fortunately, MEMS technology breaks through that restriction, an interdigitated comb structure has been demonstrated in this paper. The comb structure has two sets of comb gratings; one is stationary and the other is movable in the horizontal plane. By driving the movable comb gratings, the intensity of diffraction will be adjustable. Under the condition of Fraunhofer approximation, the broadening extent of zero-order diffraction is monotonically increasing with the longitudinal displacement, and the relation between the intensity of first-order diffraction and the lateral displacement is a cosine squared function. A displacement sensor based on movable comb structures is presented and detailed analysis on sensitivity factors is given.
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Naike Wei, Naike Wei, Weimin Wang, Weimin Wang, Jun Yao, Jun Yao, Kefan Chen, Kefan Chen, Jianhua Zhu, Jianhua Zhu, Fuhua Gao, Fuhua Gao, "Characteristics of sensors based on MEMS grating with interdigitated comb structures", Proc. SPIE 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 76571O (22 October 2010); doi: 10.1117/12.866339; https://doi.org/10.1117/12.866339

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