The manufacture of a binary optic liquid crystal blazed grating and its electro-optical properties

Kun Liu; Ziqiang Huang; Jimin Wang; Zhiyong Wu; Yangdong Sun; Lingjiang Kong

doi:10.1117/12.867732

22 October 2010 The manufacture of a binary optic liquid crystal blazed grating and its electro-optical properties

Kun Liu, Ziqiang Huang, Jimin Wang, Zhiyong Wu, Yangdong Sun, Lingjiang Kong

Proceedings Volume 7658, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Detector, Imager, Display, and Energy Conversion Technology; 76583A (2010) https://doi.org/10.1117/12.867732
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

A photoresist film was applied on the indium tin oxide (ITO) conductive glass which was coated with silver. The photoinduced changes of the photoresist film were achieved by exposure to UV lamp through a grating & lead pattern photomask. The photoresist film exhibited grating lines and lead patterns after development. The Ag-ITO double film coated with photoresist patterns was etched to double-layer electrode patterns by ion beam. After photoresists were stripped, silver grating electrodes were removed and ITO grating electrodes were coated with polyimide (PI) and treated by rubbing. The orientation was perpendicular to grating. The back electrode was a piece of ITO glass which was oriented by the same method. Nematic liquid crystal (LC) was injected into the grating cell. Other silver-leads were retained and connected with driver ICs and flex circuits. The binary optic liquid crystal blazed grating was fabricated. Step-shaped phase was obtained by applying a step-shaped voltage on LC grating electrodes. It formed blazed grating at one order and the diffraction angle can be shifted dynamically. The sample was checked up by the optical microscope and the He-Ne laser. The results indicate that the sample had clear grating structure and every grating electrode can be controlled separately. The range of the first order of diffraction angle was ±6° in theory. The diffraction efficiency decreased as the diffraction angle increased, and the maximum diffraction efficiency can exceed 80 %.

Citation Download Citation

Kun Liu, Ziqiang Huang, Jimin Wang, Zhiyong Wu, Yangdong Sun, and Lingjiang Kong "The manufacture of a binary optic liquid crystal blazed grating and its electro-optical properties", Proc. SPIE 7658, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Detector, Imager, Display, and Energy Conversion Technology, 76583A (22 October 2010); https://doi.org/10.1117/12.867732

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KEYWORDS

Electrodes

Diffraction

Liquid crystals

Diffraction gratings

Photoresist materials

Glasses

Lead

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