22 October 2010 Study on optical properties of two-color microbolometers
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Abstract
In this article, the practical structure of two-color microbolometers for uncooled infrared detection was considered, a mathematical model to calculate infrared absorptance was described. The optical characteristic of multilayer structure consisting of Nitride (SiNx) infrared absorber film/ Vanadium (VOx) heat sensitive film/ SiNx support film/ the first optical resonant cavity/ a tunable reflecting Al micromirror/ the second optical resonant cavity /a bottom electrode made up of Al was investigated. According to optical admittance matrix theory, relation between infrared absorber film thickness, the first optical resonant cavity of two-color microbolometer and infrared absorptivity was simulated by MATLAB software.
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Henan Zhao, Henan Zhao, Tao Wang, Tao Wang, He Yu, He Yu, Chao Chen, Chao Chen, Yadong Jiang, Yadong Jiang, } "Study on optical properties of two-color microbolometers", Proc. SPIE 7658, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Detector, Imager, Display, and Energy Conversion Technology, 76585A (22 October 2010); doi: 10.1117/12.866319; https://doi.org/10.1117/12.866319
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