3 May 2010 Fabrication and performance of InAs/GaSb-based superlattice LWIR detectors
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Abstract
InAs/GaSb-based type II superlattices (T2SL) offer a manufacturable FPA technology with FPA size, scalability and cost advantages over HgCdTe. Work at Jet Propulsion Laboratory (JPL), Naval Research Laboratory (NRL), and Northwestern University (NWU) has shown that the performance gap between HgCdTe and T2SL FPAs has narrowed to within 5-10x over the last two years1,2,3. Due to the potential of T2SL technology for fabrication of large format (> 1k x1k) and dual-band arrays, HRL has recently resurrected efforts in this area4. We describe the progress on the FastFPA program funded by the Army Night Vision Labs towards the development of detectors and focal plane arrays (FPAs). Progress made in the areas of MBE growth, mesa diode fabrication, dry etch processing, and FPA fabrication over the last one year is presented.
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Sevag Terterian, Sevag Terterian, Brett Nosho, Brett Nosho, Hasan Sharifi, Hasan Sharifi, Pamela Patterson, Pamela Patterson, Rajesh Rajavel, Rajesh Rajavel, } "Fabrication and performance of InAs/GaSb-based superlattice LWIR detectors", Proc. SPIE 7660, Infrared Technology and Applications XXXVI, 76601O (3 May 2010); doi: 10.1117/12.853410; https://doi.org/10.1117/12.853410
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