Scaling and application of commercial, feature-rich, modular mixed-signal technology platforms for large format ROICs

Arjun Kar-Roy; Marco Racanelli; David Howard; Glenn Miyagi; Mark Bowler; Scott Jordan; Tao Zhang; William Krieger

doi:10.1117/12.850836

3 May 2010 Scaling and application of commercial, feature-rich, modular mixed-signal technology platforms for large format ROICs

Arjun Kar-Roy, Marco Racanelli, David Howard, Glenn Miyagi, Mark Bowler, Scott Jordan, Tao Zhang, William Krieger

Author Affiliations +

Proceedings Volume 7660, Infrared Technology and Applications XXXVI; 76603V (2010) https://doi.org/10.1117/12.850836
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

Today's modular, mixed-signal CMOS process platforms are excellent choices for manufacturing of highly integrated, large-format read out integrated circuits (ROICs). Platform features, that can be used for both cooled and un-cooled ROIC applications, can include (1) quality passives such as 4fFμm² stacked MIM capacitors for linearity and higher density capacitance per pixel, 1kOhm high-value poly-silicon resistors, 2.8μm thick metals for efficient power distribution and reduced I-R drop; (2) analog active devices such as low noise single gate 3.3V, and 1.8V/3.3V or 1.8V/5V dual gate configurations, 40V LDMOS FETs, and NPN and PNP devices, deep n-well for substrate isolation for analog blocks and digital logic; (3) tools to assist the circuit designer such as models for cryogenic temperatures, CAD assistance for metal density uniformity determination, statistical, X-sigma and PCM-based models for corner validation and to simulate design sensitivity, and (4) sub-field stitching for large die. The TowerJazz platform of technology for 0.50μm, 0.25μm and 0.18μm CMOS nodes, with features as described above, is described in detail in this paper.

Citation Download Citation

Arjun Kar-Roy, Marco Racanelli, David Howard, Glenn Miyagi, Mark Bowler, Scott Jordan, Tao Zhang, and William Krieger "Scaling and application of commercial, feature-rich, modular mixed-signal technology platforms for large format ROICs", Proc. SPIE 7660, Infrared Technology and Applications XXXVI, 76603V (3 May 2010); https://doi.org/10.1117/12.850836

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