23 April 2010 Chemical and biological sensors based on nanomembrane technology
Author Affiliations +
Abstract
There is a growing need for miniature low-cost chemical sensors in monitoring environmental conditions. Applications range from environmental pollution monitoring, industrial process control and homeland security threat detection to biomedical diagnostics. Integrated opto-electronic sensors can provide chemical & biological sensing by monitoring attachment induced changes in the refractive, absorptive, or luminescent properties of materials. Nanomembranes (NMs) are single crystals that have been released from SOI substrates and redeposited on foreign flexible or flat substrates enabling the best features of different materials. Silicon Nanomembrane technology can enable the fabrication of compact, replaceable/disposable and highly sensitive optoelectronic sensors for chemical and biological sensing.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ozgenc Ebil, Ozgenc Ebil, Ahmed S. Sharkawy, Ahmed S. Sharkawy, Mathew J. Zablocki, Mathew J. Zablocki, Dennis W. Prather, Dennis W. Prather, } "Chemical and biological sensors based on nanomembrane technology", Proc. SPIE 7673, Advanced Environmental, Chemical, and Biological Sensing Technologies VII, 767308 (23 April 2010); doi: 10.1117/12.852435; https://doi.org/10.1117/12.852435
PROCEEDINGS
9 PAGES


SHARE
Back to Top