Paper
5 May 2010 Engineered carbon nanotubes and graphene for nano-electronics and nanomechanics
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Abstract
We are exploring nanoelectronic engineering areas based on low dimensional materials, including carbon nanotubes and graphene. Our primary research focus is investigating carbon nanotube and graphene architectures for field emission applications, energy harvesting and sensing. In a second effort, we are developing a high-throughput desktop nanolithography process. Lastly, we are studying nanomechanical actuators and associated nanoscale measurement techniques for re-configurable arrayed nanostructures with applications in antennas, remote detectors, and biomedical nanorobots. The devices we fabricate, assemble, manipulate, and characterize potentially have a wide range of applications including those that emerge as sensors, detectors, system-on-a-chip, system-in-a-package, programmable logic controls, energy storage systems, and all-electronic systems.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. H. Yang "Engineered carbon nanotubes and graphene for nano-electronics and nanomechanics", Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 767902 (5 May 2010); https://doi.org/10.1117/12.851012
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Cited by 5 scholarly publications.
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KEYWORDS
Graphene

Nanolithography

Carbon nanotubes

Sensors

Nanoelectronics

Nanostructures

Control systems

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