Carbon-based nano-electro-mechanical systems

A. B. Kaul; A. R. Khan; K. G. Megerian; L. Epp; H. G. LeDuc; L. Bagge; A. T. Jennings; D. Jang; J. R. Greer

doi:10.1117/12.851293

5 May 2010 Carbon-based nano-electro-mechanical systems

A. B. Kaul, A. R. Khan, K. G. Megerian, L. Epp, H. G. LeDuc, L. Bagge, A. T. Jennings, D. Jang, J. R. Greer

Proceedings Volume 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II; 76790N (2010) https://doi.org/10.1117/12.851293
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

We provide an overview of our work where carbon-based nanostructures have been applied to twodimensional (2D) planar and three-dimensional (3D) vertically-oriented nano-electro-mechanical (NEM) switches. In the first configuration, laterally oriented single-walled nanotubes (SWNTs) synthesized using thermal chemical vapor deposition (CVD) were implemented for forming bridge-type 2D NEMS switches, where switching voltages were on the order of a few volts. In the second configuration, vertically oriented carbon nanofibers (CNFs) synthesized using plasma-enhanced (PE) CVD have been explored for their potential application in 3D NEMS. We have performed nanomechanical measurements on such vertically oriented tubes using nanoindentation to determine the mechanical properties of the CNFs. Electrostatic switching was demonstrated in the CNFs synthesized on refractory metallic nitride substrates, where a nanoprobe was used as the actuating electrode inside a scanning-electron-microscope. The switching voltages were determined to be in the tens of volts range and van der Waals interactions at these length scales appeared significant, suggesting such structures are promising for nonvolatile memory applications. A finite element model was also developed to determine a theoretical pull-in voltage which was compared to experimental results.

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A. B. Kaul, A. R. Khan, K. G. Megerian, L. Epp, H. G. LeDuc, L. Bagge, A. T. Jennings, D. Jang, and J. R. Greer "Carbon-based nano-electro-mechanical systems", Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76790N (5 May 2010); https://doi.org/10.1117/12.851293

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KEYWORDS

Nanoelectromechanical systems

Scanning electron microscopy

Silicon

Switching

Electrodes

Switches

Nanoprobes

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