AlGaN/GaN high-electron mobility transistor-based sensors for environmental and bio-applications

B. H. Chu; Y. L. Wang; K. H. Chen; C. Y. Chang; C. F. Lo; S. J. Pearton; G. Papadi; J. K. Coleman; B. J. Sheppard; C. F. Dungen; Kevin Kroll; Nancy Denslow; A. Dabiran; P. P. Chow; J. W. Johnson; E. L. Pine; K. J. Linthicum; F. Ren

doi:10.1117/12.844995

5 May 2010 AlGaN/GaN high-electron mobility transistor-based sensors for environmental and bio-applications

B. H. Chu, Y. L. Wang, K. H. Chen, C. Y. Chang, C. F. Lo, S. J. Pearton, G. Papadi, J. K. Coleman, B. J. Sheppard, C. F. Dungen, Kevin Kroll, Nancy Denslow, A. Dabiran, P. P. Chow, J. W. Johnson, E. L. Pine, K. J. Linthicum, F. Ren

Author Affiliations +

Proceedings Volume 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II; 76790Q (2010) https://doi.org/10.1117/12.844995
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

A promising sensing technology utilizing AlGaN/GaN high electron mobility transistors (HEMTs) has been developed to analyze a wide variety of environmental and biological gases and liquids. The conducting 2DEG channel of GaN/AlGaN HEMTs is very close to the surface and extremely sensitive to adsorption of analytes. Examples of detecting mercury ions, perkinsus, lactic acid, carbon dioxide, and vitellogenin are discussed in this paper.

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B. H. Chu, Y. L. Wang, K. H. Chen, C. Y. Chang, C. F. Lo, S. J. Pearton, G. Papadi, J. K. Coleman, B. J. Sheppard, C. F. Dungen, Kevin Kroll, Nancy Denslow, A. Dabiran, P. P. Chow, J. W. Johnson, E. L. Pine, K. J. Linthicum, and F. Ren "AlGaN/GaN high-electron mobility transistor-based sensors for environmental and bio-applications", Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76790Q (5 May 2010); https://doi.org/10.1117/12.844995

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