5 May 2010 Fabrication of freestanding SWCNT networks for fast microbolometric focal plane array sensor
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Abstract
We have investigated the feasibility of significantly improving the performance of currently favored uncooled infrared (IR) detectors based on Si or VOx microbolometers with a new design employing freestanding suspended network of single-walled carbon nanotubes (SWCNTs). Such networks have high absorption coefficient, high temperature coefficient of the resistance (TCR) and extremely low thermal mass. This combination of parameters translates into an uncooled IR detector with high sensitivity and a very fast temporal response. We show estimates of key parameters for such a device, demonstrate a method to prepare it using suspended SWCNT networks achieved by selective removal of a sacrificial oxide layer, thereby forming a cavity under the SWCNT network. We also present TCR and photothermal bolometric response data of this conceptual structure.
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Jiri Cech, Jiri Cech, V. Swaminathan, V. Swaminathan, P. Wijewarnasuriya, P. Wijewarnasuriya, Luke J. Currano, Luke J. Currano, Andriy Kovalskiy, Andriy Kovalskiy, H. Jain, H. Jain, } "Fabrication of freestanding SWCNT networks for fast microbolometric focal plane array sensor", Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76792N (5 May 2010); doi: 10.1117/12.855589; https://doi.org/10.1117/12.855589
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