27 April 2010 Thermopile linear array for spectroscopy applications
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Abstract
An uncooled linear array of 66 infrared elements has been designed, simulated, and fabricated using MEMS techniques. CMOS compatible poly-Silicon thermoelectric materials are utilized. Numerical simulations optimize the geometry and physical parameters for the thermopile materials. The pixel dimensions are 2.0 mm x 0.45 mm with 0.5 mm pitch. Excellent performance has been obtained in Nitrogen environment: D* = 1.2 x 108 cm √Hz/W; ι = 31 ms; and cross talk of <15%. Measured performance is comparable to, and in some respects exceeds, the performance of thermopile linear arrays based on Bi and Sb materials. The arrays are packaged for integration with an existing dispersive infrared spectrometer.
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A. Levin, A. Levin, W. Baer, W. Baer, S. Harrigan, S. Harrigan, J. Zewicke, J. Zewicke, R. S. Toth, R. S. Toth, } "Thermopile linear array for spectroscopy applications", Proc. SPIE 7680, Next-Generation Spectroscopic Technologies III, 76800J (27 April 2010); doi: 10.1117/12.850308; https://doi.org/10.1117/12.850308
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