27 April 2010 Sensitivity analysis of an assembled Fourier transform microspectrometer
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This paper presents the statistical formulation of misalignments of optical components. As a case study, sensitivity analysis is performed to evaluate the optical performance of an assembled Fourier Transform (FT) microspectrometer. Precision alignment of optical components is a critical factor to achieve high sensitive measurement. Positional and angular misalignments of optical components are propagated and accumulated from one part to another as the beam is delivered. Optical paths are modeled as kinematic variables of a linked chain, and its propagation is calculated using forward kinematics with homogeneous transform matrices. This approach not only formulates the deviation of beam paths as traditional optics do, but also accommodates statistical variables to represent the mean and variance of kinematic errors. With the assumption of Gaussian distribution of the errors, the statistical equation was linearly propagated. The beam deviation was further combined with a light coupling model at the detector to evaluate the degradation of optical. Its prototype and experimental results were also reported.
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Jeongsik Sin, Jeongsik Sin, Woo Ho Lee, Woo Ho Lee, Harry E. Stephanou, Harry E. Stephanou, } "Sensitivity analysis of an assembled Fourier transform microspectrometer", Proc. SPIE 7680, Next-Generation Spectroscopic Technologies III, 76800T (27 April 2010); doi: 10.1117/12.850800; https://doi.org/10.1117/12.850800


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