27 April 2010 CMOS-compatible LVOF-based visible microspectrometer
Author Affiliations +
Abstract
This paper reports on a CMOS-Compatible Linear Variable Optical Filter (LVOF) visible micro-spectrometer. The CMOS-compatible post process for fabrication of the LVOF has been used for integration of the LVOF with a CMOS chip containing a 128-element photodiode array and readout circuitry. Fabrication of LVOF involves a process for fabrication of very small taper angles, ranging from 0.001° to 0.1°, in SiO2. These layers can be fabricated flexibly in a resist layer by just one lithography step and a subsequent reflow process. The 3D pattern of the resist structures is subsequently transferred into SiO2 by appropriate etching. Complete LVOF fabrication involves CMOS-compatible deposition of a lower dielectric mirror using a stack of dielectrics on the wafer, tapered layer formation and deposition of the top dielectric mirror. The LVOF has been optimized for 580 nm - 720 nm spectral operating range and has also been mounted on a CCD camera for characterization. The design of LVOF micro-spectrometer, the fabrication and characterization results are presented.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Arvin Emadi, Arvin Emadi, Huaiwen Wu, Huaiwen Wu, Ger de Graaf, Ger de Graaf, Reinoud F. Wolffenbuttel, Reinoud F. Wolffenbuttel, } "CMOS-compatible LVOF-based visible microspectrometer", Proc. SPIE 7680, Next-Generation Spectroscopic Technologies III, 76800W (27 April 2010); doi: 10.1117/12.849844; https://doi.org/10.1117/12.849844
PROCEEDINGS
8 PAGES


SHARE
Back to Top