19 April 2010 Cubic ZnxMg1-xO and NiyMg1-yO thin films grown by molecular beam epitaxy for deep-UV optoelectronic applications
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Abstract
We will discuss the epitaxial growth, characterization, and application of a new set of ternary cubic oxide semiconductor compounds, ZnxMg1-xO and NiyMg1-yO, offering a new route towards deep-UV optical devices. Results demonstrating bandgap tunability and excellent thin film quality will be presented validating the potential of these alloys in the 200 - 350 nm region. Significantly, we have successfully fabricated MSM solar blind detectors using both ternary alloys, demonstrating operation in the solar blind region without external opal filters.
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J. W. Mares, J. W. Mares, C. R. Boutwell, C. R. Boutwell, A. Scheurer, A. Scheurer, W. V. Schoenfeld, W. V. Schoenfeld, } "Cubic ZnxMg1-xO and NiyMg1-yO thin films grown by molecular beam epitaxy for deep-UV optoelectronic applications", Proc. SPIE 7700, Enabling Photonics Technologies for Defense, Security, and Aerospace Applications VI, 77000L (19 April 2010); doi: 10.1117/12.853209; https://doi.org/10.1117/12.853209
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