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13 May 2010 Fabrication of GaN/AlGaN 1D photonic crystals designed for nonlinear optical applications
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In this paper we present a reliable process to fabricate GaN/AlGaN one dimensional photonic crystal (1D-PhC) microcavities with nonlinear optical properties. We used a heterostructure with a GaN layer embedded between two AlGaN/GaN Distributed Bragg Reflectors on sapphire substrate, designed to generate a λ= 800 nm frequency downconverted signal (χ(2) effect) from an incident pump signal at λ= 400 nm. The heterostructure was epitaxially grown by metal organic chemical vapour deposition (MOCVD) and integrates a properly designed 1D-PhC grating, which amplifies the signal by exploiting the double effect of cavity resonance and non linear GaN enhancement. The integrated 1D-PhC microcavity was fabricate combing a high resolution e-beam writing with a deep etching technique. For the pattern transfer we used ~ 170 nm layer Cr metal etch mask obtained by means of high quality lift-off technique based on the use of bi-layer resist (PMMA/MMA). At the same time, plasma conditions have been optimized in order to achieve deeply etched structures (depth over 1 micron) with a good verticality of the sidewalls (very close to 90°). Gratings with well controlled sizes (periods of 150 nm, 230 nm and 400 nm respectively) were achieved after the pattern is transferred to the GaN/AlGaN heterostructure.
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T. Stomeo, G. Epifani, V. Tasco, A. Massaro, I. Tarantini, A. Campa, M. De Vittorio, A. Passaseo, M. Braccini, M. C. Larciprete, C. Sibilia, and F. A. Bovino "Fabrication of GaN/AlGaN 1D photonic crystals designed for nonlinear optical applications", Proc. SPIE 7713, Photonic Crystal Materials and Devices IX, 771316 (13 May 2010);


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