13 May 2010 Nanometre control and determination of hole size in photonic crystal slabs
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Abstract
All photonic crystal slab designs rely on the accurate control of the sizes of the holes during fabrication - a small error of just a few nanometers can mean a shift of tens of nanometers in the operating wavelength of the device. A key problem is the measurement of the hole size. We have developed an optical method which determines the functional hole diameter with a typical accuracy of 5 nm. We also suggest a way for the nanometre control of the hole diameter.
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Daryl M. Beggs, Liam O'Faolain, Thomas F. Krauss, "Nanometre control and determination of hole size in photonic crystal slabs", Proc. SPIE 7713, Photonic Crystal Materials and Devices IX, 77131Y (13 May 2010); doi: 10.1117/12.854969; https://doi.org/10.1117/12.854969
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