13 May 2010 Nanometre control and determination of hole size in photonic crystal slabs
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Abstract
All photonic crystal slab designs rely on the accurate control of the sizes of the holes during fabrication - a small error of just a few nanometers can mean a shift of tens of nanometers in the operating wavelength of the device. A key problem is the measurement of the hole size. We have developed an optical method which determines the functional hole diameter with a typical accuracy of 5 nm. We also suggest a way for the nanometre control of the hole diameter.
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Daryl M. Beggs, Daryl M. Beggs, Liam O'Faolain, Liam O'Faolain, Thomas F. Krauss, Thomas F. Krauss, } "Nanometre control and determination of hole size in photonic crystal slabs", Proc. SPIE 7713, Photonic Crystal Materials and Devices IX, 77131Y (13 May 2010); doi: 10.1117/12.854969; https://doi.org/10.1117/12.854969
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