Membrane-based aberration-corrected tunable micro-lenses

Philipp Waibel; Eugen Ermantraut; Daniel Mader; Hans Zappe; Andreas Seifert

doi:10.1117/12.853140

12 May 2010 Membrane-based aberration-corrected tunable micro-lenses

Philipp Waibel, Eugen Ermantraut, Daniel Mader, Hans Zappe, Andreas Seifert

Proceedings Volume 7716, Micro-Optics 2010; 77160E (2010) https://doi.org/10.1117/12.853140
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

We present measurements and simulations of membrane-based micro-lens stacks, tunable in focal length in the range of 10mm to 50mm without chromatic aberration. The pressure-actuated, liquid-filled, membrane-based micro-lenses are fabricated by an all-silicone molding approach and consist of three chambers separated by two highly flexible silicone-membranes. Based on the idea of the classical achromatic Fraunhofer doublet, two different liquids with suitable optical properties are used. Pressure-dependent surface topologies are measured by profilometry for determining the correlation between refraction and applied pressure. The profiles are fit to polynomials; the coefficients of the polynomials are pressure-dependent and fit to empirically determined functions which are then used as an input for optical ray-tracing. Using this approach, the focal length is tunable while compensating for chromatic aberration by suitably applied pressures.

Citation Download Citation

Philipp Waibel, Eugen Ermantraut, Daniel Mader, Hans Zappe, and Andreas Seifert "Membrane-based aberration-corrected tunable micro-lenses", Proc. SPIE 7716, Micro-Optics 2010, 77160E (12 May 2010); https://doi.org/10.1117/12.853140

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