13 May 2010 Microspectral sensors: concepts, efficiency and manufacturing
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Abstract
In this contribution we are focusing on two challenges concerning the development of new spectrometer concepts. First, we present different concepts to adjust or even to increase the detection efficiency of spectrometer modules over a broad spectral range. The discussion involves a spectral recycling loop, a reflective multilayer approach for efficiency achromatization and a concept based on spectral pre-selection. The second focus of this contribution concerns the miniaturization of spectrometer setups. We present a highly compact imaging miniature spectrometer module for applications that allow a very limited installation volume. The miniature spectrometer has an optical volume of just 11 x 6 x 5 mm3. The implementation of the spectroscopic "multi-order principle", which exploits successive diffraction orders, means that the central stress field between high spectral resolution and a large bandwidth can be dissolved. The manufacturing process of the spectrometer includes the mastering of the concave grating by interference lithography, the tooling and the replication process by injection molding.
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R. Brunner, R. Brunner, M. Burkhardt, M. Burkhardt, R. Steiner, R. Steiner, O. Sandfuchs, O. Sandfuchs, } "Microspectral sensors: concepts, efficiency and manufacturing", Proc. SPIE 7716, Micro-Optics 2010, 771611 (13 May 2010); doi: 10.1117/12.858254; https://doi.org/10.1117/12.858254
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