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13 May 2010 Fabrication and characterization of high-Q conical polymeric microcavities
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In this work we present the fabrication and characterization of high-Q microresonators made of low loss, thermoplastic polymer poly(methyl methacrylate) (PMMA), which are directly processed on a silicon substrate. Using this polymer-on-silicon material in combination with a thermal reflow step enables cavities of conical shape and ultra smooth surface, dramatically reducing the optical losses caused by surface scatting of the whispering-gallery-modes (WGMs). The cavity Q factor is above two million in the 1300 nm wavelength range and can theoretically reach values up to ten million in the visible. Finite element simulations show the existence of a variety of higher order radial and axial WGMs explaining the complexity of the transmission spectra measured using a tunable diode laser coupled to a tapered optical fiber waveguide.
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Mario Hauser, Tobias Grossmann, Simone Schleede, Julian Fischer, Torsten Beck, Christoph Vannahme, Timo Mappes, and Heinz Kalt "Fabrication and characterization of high-Q conical polymeric microcavities", Proc. SPIE 7716, Micro-Optics 2010, 77161Z (13 May 2010); doi: 10.1117/12.853862;

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