13 May 2010 Integrated glass lenses fabrication for parallel interferometric inspection systems of MEMS and MOEMS
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Abstract
We present the application of glass microlenses for the fabrication of inspection systems based on interferometric measurements. The microlenses are molded from wet etched silicon by using microfabrication techniques. The concerned system requires lenses to be used in a Mirau interferometer configuration. The principle of the system is presented, as well as different choices of lenses to be integrated. The use of glass microlenses monolithically molded on a substrate is proven as the proper technology to be used in the system.
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Jorge Albero, Sylwester Bargiel, Christophe Gorecki, Kay Gastinger, "Integrated glass lenses fabrication for parallel interferometric inspection systems of MEMS and MOEMS", Proc. SPIE 7716, Micro-Optics 2010, 771621 (13 May 2010); doi: 10.1117/12.853907; https://doi.org/10.1117/12.853907
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