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14 May 2010 CCD-ARS set-up: a comprehensive and fast high-sensitivity characterisation tool for optical components
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Abstract
A comprehensive characterisation tool for optical component is presented here. Based on both light scattering and imaging principles, the CCD-ARS set up allows to separate and study localized defects contribution from the local roughness measurement. The numerical method involved to discriminate intrinsic roughness from the influence of defects is detailed and some results are given.
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Myriam Zerrad, Michel Lequime, Carole Deumié, and Claude Amra "CCD-ARS set-up: a comprehensive and fast high-sensitivity characterisation tool for optical components", Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180A (14 May 2010); https://doi.org/10.1117/12.854059
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