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14 May 2010 Optical characterization of semiconductor microlenses using a Mach-Zehnder interferometer in the near-infrared region
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Abstract
We present a Mach-Zehnder interferometer to characterize semiconductor microlenses in transmission. We therefore make use of a wavelength of 1550nm with the possibility of expansion towards the IR spectrum. In this paper, the concept of our interferometer as well as the set-up is explained. We demonstrate the working principle and measurements on fused silica and silicon microlenses and benchmark the experimental results with measurement data obtained with well established micro-optics instrumentation tools.
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H. Ottevaere, N. Vermeulen, V. Gomez, and H. Thienpont "Optical characterization of semiconductor microlenses using a Mach-Zehnder interferometer in the near-infrared region", Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180N (14 May 2010); https://doi.org/10.1117/12.854690
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