14 May 2010 Advances in the development of the LNE metrological atomic force microscope
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Abstract
SPM users need to calibrate their instrument periodically in order to provide some traceable measurements and to improve their measurements capabilities. This calibration task is achieved thanks to standards - 1D or 2D gratings - whose dimensional characteristics have been characterized by a National Metrology Institute. Within this context, LNE is developing a home made metrological Atomic Force Microscope (mAFM) with direct traceable measurement capabilities. This mAFM will be able to calibrate those standards. The measurement volume is about 60 μm for X and Y axis and about 10 μm for Z axis. The expected uncertainty for the tip-sample relative position measurement is in the order of 1 nm. This paper focus on the specific development that have been achieved: a three axis flexure stage with very high guidance capability, an optimized metrology loop and a specific design with four differential dual-pass interferometer that provide an Abbe error below 1nm for the whole measuring volume.
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Benoit Poyet, Benoit Poyet, Sébastien Ducourtieux, Sébastien Ducourtieux, } "Advances in the development of the LNE metrological atomic force microscope", Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180U (14 May 2010); doi: 10.1117/12.854201; https://doi.org/10.1117/12.854201
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