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14 May 2010 Millimeter scale topographical image of highly integrated optical structures using enlarged metrological atomic-force microscopy
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Abstract
We developed a home-made sample-holder unit used for 2D nano-positioning with millimeter travelling ranges. For each displacement axis, the system includes a long range travelling stage and a piezoelectric actuator for accurate positioning. Specific electronics is integrated according to metrological considerations, enhancing the repeatability performances. The aim of this work is to demonstrate that near-field microscopy at the scale of a chip is possible. We chose here to characterize highly integrated optical structures. For this purpose, the sample-holder is integrated into an Atomic Force Microscope in order to perform optical imaging. To demonstrate the overall performances, a millimeter scale optical images have been realized.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Suat Topsu, Luc Chassagne, Ahmad Sinno, Pascal Ruaux, Yasser Alayli, Gilles Lerondel, Stéphane Blaize, Auréline Bruyant, and Pascal Royer "Millimeter scale topographical image of highly integrated optical structures using enlarged metrological atomic-force microscopy", Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180V (14 May 2010); https://doi.org/10.1117/12.853586
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