Test objects for calibration of SEMs and AFMs operating at the nanoscale

V. P. Gavrilenko; Yu A. Novikov; A. V. Rakov; P. A. Todua

doi:10.1117/12.853892

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14 May 2010 Test objects for calibration of SEMs and AFMs operating at the nanoscale

V. P. Gavrilenko, Yu A. Novikov, A. V. Rakov, P. A. Todua

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Proceedings Volume 7718, Optical Micro- and Nanometrology III; 77180Y (2010) https://doi.org/10.1117/12.853892
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

Test objects for calibration of scanning electron microscopes (SEMs) and atomic force microscopes (AFMs) operating in the nanometer range are analyzed. All the test objects can be divided into three groups: (a) structures with right-angled profiles; (b,c) structures with trapezoidal profiles and small/large angles of sidewalls inclination. Calibration methods for SEMs and AFMs, based on such structures, are presented. Structures with trapezoidal profiles and large angles of sidewall inclination offer the most broad range of calibration opportunities for SEMs and AFMs.

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V. P. Gavrilenko, Yu A. Novikov, A. V. Rakov, and P. A. Todua "Test objects for calibration of SEMs and AFMs operating at the nanoscale", Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180Y (14 May 2010); https://doi.org/10.1117/12.853892

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