Digital holographic microscopy for silicon microsystems metrology

Yves Delacrétaz; Christian Depeursinge

doi:10.1117/12.854297

17 May 2010 Digital holographic microscopy for silicon microsystems metrology

Proceedings Volume 7719, Silicon Photonics and Photonic Integrated Circuits II; 77191M (2010) https://doi.org/10.1117/12.854297
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

We propose to use digital holographic microscopy (DHM) with an illumination in the near infrared spectrum bandwidth, where the silicon is known to have small absorption. With such an illumination condition, it is possible to observe a wider range of specimens than in the visible spectrum, providing a new metrology technique for 3D silicon micro-systems characterization. Suitability of DHM with near infrared illumination for micro-optical elements and wafer inspection is demonstrated. The intrinsic robustness and speed of the method place DHM as a valuable candidate for real-time quality check inside production chains, opening a wide field of applications in quality control.

Citation Download Citation

Yves Delacrétaz and Christian Depeursinge "Digital holographic microscopy for silicon microsystems metrology", Proc. SPIE 7719, Silicon Photonics and Photonic Integrated Circuits II, 77191M (17 May 2010); https://doi.org/10.1117/12.854297

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