Translator Disclaimer
17 May 2010 Digital holographic microscopy for silicon microsystems metrology
Author Affiliations +
Abstract
We propose to use digital holographic microscopy (DHM) with an illumination in the near infrared spectrum bandwidth, where the silicon is known to have small absorption. With such an illumination condition, it is possible to observe a wider range of specimens than in the visible spectrum, providing a new metrology technique for 3D silicon micro-systems characterization. Suitability of DHM with near infrared illumination for micro-optical elements and wafer inspection is demonstrated. The intrinsic robustness and speed of the method place DHM as a valuable candidate for real-time quality check inside production chains, opening a wide field of applications in quality control.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yves Delacrétaz and Christian Depeursinge "Digital holographic microscopy for silicon microsystems metrology", Proc. SPIE 7719, Silicon Photonics and Photonic Integrated Circuits II, 77191M (17 May 2010); https://doi.org/10.1117/12.854297
PROCEEDINGS
5 PAGES


SHARE
Advertisement
Advertisement
Back to Top