Results Of Automating A Photolithography Cell In A Clean Tunnel

David H. June

doi:10.1117/12.967053

1 January 1987 Results Of Automating A Photolithography Cell In A Clean Tunnel

David H. June

Proceedings Volume 0772, Optical Microlithography VI; (1987) https://doi.org/10.1117/12.967053
Event: Microlithography Conferences, 1987, Santa Clara, CA, United States

Abstract

A prototype automated photobay was installed in an existing fab area utilizing flexible material handling techniques within a clean tunnel. The project objective was to prove design concepts of automated cassette-to-cassette handling within a clean tunnel that isolated operators from the wafers being processed. Material handling was by monorail track transport system to feed cassettes to pick and place robots. The robots loaded and unloaded cassettes of wafers to each of the various pieces of process equipment. The material handling algorithms, recipe downloading and statistical process control functions were all performed by custom software on the photobay cell controller.

Citation Download Citation

David H. June "Results Of Automating A Photolithography Cell In A Clean Tunnel", Proc. SPIE 0772, Optical Microlithography VI, (1 January 1987); https://doi.org/10.1117/12.967053

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