A CMOS 128-APS linear array integrated with a LVOF for highsensitivity and high-resolution micro-spectrophotometry

Chi Liu; Arvin Emadi; Huaiwen Wu; Ger de Graaf; Reinoud F. Wolffenbuttel

doi:10.1117/12.854584

13 May 2010 A CMOS 128-APS linear array integrated with a LVOF for highsensitivity and high-resolution micro-spectrophotometry

Chi Liu, Arvin Emadi, Huaiwen Wu, Ger de Graaf, Reinoud F. Wolffenbuttel

Author Affiliations +

Proceedings Volume 7726, Optical Sensing and Detection; 772616 (2010) https://doi.org/10.1117/12.854584
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

A linear array of 128 Active Pixel Sensors has been developed in standard CMOS technology and a Linear Variable Optical Filter (LVOF) is added using CMOS-compatible post-process, resulting in a single chip highly-integrated highresolution microspectrometer. The optical requirements imposed by the LVOF result in photodetectors with small pitch and large length in the direction normal to the dispersed spectrum (7.2μ;m×300μm). The specific characteristics of the readout are the small pitch, low optical signals (typically a photocurrent of 100fA~1pA) and a much longer integration time as compared to regular video (typically 100μs~63s). These characteristics enable a very different trade-off between SNR and integration time and IC-compatibility. The system discussed in this paper operates in the visible part of the spectrum. The prototype is fabricated in the AMIS 0.35μm A/D CMOS technology.

Citation Download Citation

Chi Liu, Arvin Emadi, Huaiwen Wu, Ger de Graaf, and Reinoud F. Wolffenbuttel "A CMOS 128-APS linear array integrated with a LVOF for highsensitivity and high-resolution micro-spectrophotometry", Proc. SPIE 7726, Optical Sensing and Detection, 772616 (13 May 2010); https://doi.org/10.1117/12.854584

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available