13 May 2010 A CMOS 128-APS linear array integrated with a LVOF for highsensitivity and high-resolution micro-spectrophotometry
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Abstract
A linear array of 128 Active Pixel Sensors has been developed in standard CMOS technology and a Linear Variable Optical Filter (LVOF) is added using CMOS-compatible post-process, resulting in a single chip highly-integrated highresolution microspectrometer. The optical requirements imposed by the LVOF result in photodetectors with small pitch and large length in the direction normal to the dispersed spectrum (7.2μ;m×300μm). The specific characteristics of the readout are the small pitch, low optical signals (typically a photocurrent of 100fA~1pA) and a much longer integration time as compared to regular video (typically 100μs~63s). These characteristics enable a very different trade-off between SNR and integration time and IC-compatibility. The system discussed in this paper operates in the visible part of the spectrum. The prototype is fabricated in the AMIS 0.35μm A/D CMOS technology.
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Chi Liu, Chi Liu, Arvin Emadi, Arvin Emadi, Huaiwen Wu, Huaiwen Wu, Ger de Graaf, Ger de Graaf, Reinoud F. Wolffenbuttel, Reinoud F. Wolffenbuttel, } "A CMOS 128-APS linear array integrated with a LVOF for highsensitivity and high-resolution micro-spectrophotometry", Proc. SPIE 7726, Optical Sensing and Detection, 772616 (13 May 2010); doi: 10.1117/12.854584; https://doi.org/10.1117/12.854584
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