A CMOS 128-APS linear array integrated with a LVOF for highsensitivity and high-resolution micro-spectrophotometry

Chi Liu; Arvin Emadi; Huaiwen Wu; Ger de Graaf; Reinoud F. Wolffenbuttel

doi:10.1117/12.854584

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13 May 2010 A CMOS 128-APS linear array integrated with a LVOF for highsensitivity and high-resolution micro-spectrophotometry

Chi Liu, Arvin Emadi, Huaiwen Wu, Ger de Graaf, Reinoud F. Wolffenbuttel

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Proceedings Volume 7726, Optical Sensing and Detection; 772616 (2010) https://doi.org/10.1117/12.854584
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

A linear array of 128 Active Pixel Sensors has been developed in standard CMOS technology and a Linear Variable Optical Filter (LVOF) is added using CMOS-compatible post-process, resulting in a single chip highly-integrated highresolution microspectrometer. The optical requirements imposed by the LVOF result in photodetectors with small pitch and large length in the direction normal to the dispersed spectrum (7.2μ;m×300μm). The specific characteristics of the readout are the small pitch, low optical signals (typically a photocurrent of 100fA~1pA) and a much longer integration time as compared to regular video (typically 100μs~63s). These characteristics enable a very different trade-off between SNR and integration time and IC-compatibility. The system discussed in this paper operates in the visible part of the spectrum. The prototype is fabricated in the AMIS 0.35μm A/D CMOS technology.

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Chi Liu, Arvin Emadi, Huaiwen Wu, Ger de Graaf, and Reinoud F. Wolffenbuttel "A CMOS 128-APS linear array integrated with a LVOF for highsensitivity and high-resolution micro-spectrophotometry", Proc. SPIE 7726, Optical Sensing and Detection, 772616 (13 May 2010); https://doi.org/10.1117/12.854584

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