NEW scanning electron microscope magnification calibration reference material (RM) 8820

Michael T. Postek; András E. Vladár; William Keery; Michael Bishop; Benjamin Bunday; John Allgair

doi:10.1117/12.859118

3 June 2010 NEW scanning electron microscope magnification calibration reference material (RM) 8820

Michael T. Postek; András E. Vladár; William Keery; Michael Bishop; Benjamin Bunday; John Allgair

Author Affiliations +

Proceedings Volume 7729, Scanning Microscopy 2010; 77290D (2010) https://doi.org/10.1117/12.859118
Event: Scanning Microscopy 2010, 2010, Monterey, California, United States

Abstract

Reference Material 8820 (RM 8820) is a new scanning electron microscope calibration reference material for nanotechnology and nanomanufacturingtion recently released by NIST. This standard was developed to be used primarily for X and Y scale (or magnifi cation) calibrations of scanning electron microscopes from less than 10 times magnifi cation to more than 300 000 times magnifi cation, i.e., from about 10 mm to smaller than 300 nm range instrument fi eld of view (FOV). This standard is identifi ed as RM 8820. This is a very versatile standard, and it can also be used for calibration and testing of other type of microscopes, such as optical and scanning probe microscopes. Beyond scale calibration, RM 8820 can be used for a number of other applications, some of which will be described in this publication.

Citation Download Citation

Michael T. Postek, András E. Vladár, William Keery, Michael Bishop, Benjamin Bunday, John Allgair, "NEW scanning electron microscope magnification calibration reference material (RM) 8820", Proc. SPIE 7729, Scanning Microscopy 2010, 77290D (3 June 2010); doi: 10.1117/12.859118; https://doi.org/10.1117/12.859118

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