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3 June 2010 Transmission-type angle deviation microscope with NA=0.65 for 3D measurement
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Proceedings Volume 7729, Scanning Microscopy 2010; 77291G (2010)
Event: Scanning Microscopy 2010, 2010, Monterey, California, United States
Transmission-type laser scanning angle deviation microscopy (TADM) with NA=0.65 for three dimension (3D) measurement is presented. It is based on the theorems of geometrical angular deviation and surface plasmon resonance (SPR) and the use of the common-path heterodyne interferometry. When a laser beam defocuses on the surface of a transparent sample, the transmission light will be deviated a small angle from the optical axis and the deviation angle is proportional to the defocus length and the square of the numerical aperture. We used a SPR angular sensor and the common-path heterodyne interferometry to measure this deviation angle. Scanning the sample, the phase profile was measured and transferred to surface height pattern, the 3D surface profile was obtained in real-time. The results showed that the dynamic range and lateral and axial resolutions were equal to ±5.6 μm, 0.3 μm, and 3 nm, respectively.
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Ming-Hung Chiu, Chin-Fa Lai, Chen-Tai Tan, and Yi-Zhi Lin "Transmission-type angle deviation microscope with NA=0.65 for 3D measurement", Proc. SPIE 7729, Scanning Microscopy 2010, 77291G (3 June 2010);

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