Paper
10 August 2010 The JWST/NIRCam coronagraph flight occulters
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Abstract
The NIRCam instrument on the James Webb Space Telescope will have a Lyot coronagraph for high contrast imaging of extrasolar planets and circumstellar disks at λ=2 - 5 μm. Half-tone patterns are used to create graded-transmission image plane masks. These are generated using electron beam lithography and reactive ion etching of a metal layer on an antireflection coated sapphire substrate. We report here on the manufacture and evaluation of the flight occulters.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John E. Krist, Kunjithapatham Balasubramanian, Richard E. Muller, Stuart B. Shaklan, Douglas M. Kelly, Daniel W. Wilson, Charles A. Beichman, Eugene Serabyn, Yalan Mao, Pierre M. Echternach, John T. Trauger, and Kurt M. Liewer "The JWST/NIRCam coronagraph flight occulters", Proc. SPIE 7731, Space Telescopes and Instrumentation 2010: Optical, Infrared, and Millimeter Wave, 77313J (10 August 2010); https://doi.org/10.1117/12.856488
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CITATIONS
Cited by 9 scholarly publications.
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KEYWORDS
Coronagraphy

James Webb Space Telescope

Aluminum

Coating

Antireflective coatings

Microscopes

Photomasks

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