Efficient EUV transmission gratings for plasma diagnostics

Christoph Braig; Ernst-Bernhard Kley

doi:10.1117/12.856463

29 July 2010 Efficient EUV transmission gratings for plasma diagnostics

Proceedings Volume 7732, Space Telescopes and Instrumentation 2010: Ultraviolet to Gamma Ray; 77322B (2010) https://doi.org/10.1117/12.856463
Event: SPIE Astronomical Telescopes + Instrumentation, 2010, San Diego, California, United States

Abstract

We report on a theoretical study of binary phase transmission gratings for high-resolution EUV and soft X-ray spectroscopy and investigate their optical properties. Designed for wavelengths between about 2 and 40 nm, the devices may provide a first order diffraction efficiency beyond 30%. We use RCWA methods in order to optimize the grating design parameters and discuss special features of segmented grating arrays. Several elemental as well as compound materials like Be, Mo, LiF and PMMA are considered with respect to their potential and practical limitations in terms of feasibility and sensitivity to radiation damage. Simulations are performed for several samples on the radiation produced by a table-top EUV plasma source and applications to astrophysical problems are considered.

Citation Download Citation

Christoph Braig and Ernst-Bernhard Kley "Efficient EUV transmission gratings for plasma diagnostics", Proc. SPIE 7732, Space Telescopes and Instrumentation 2010: Ultraviolet to Gamma Ray, 77322B (29 July 2010); https://doi.org/10.1117/12.856463

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