12 August 2010 Inductive sensors for controlling segmented mirrors: a full industrial and turnkey product solution
Author Affiliations +
Abstract
This paper presents a recent progress in designing a nanometer-accurate inductive-type of edge sensor. A new technology of Direct Deposit on Glass (DDG) has been developed. The DDG technology also has high rate of reproducibility and is suitable for the mass production and still be a very cost-effective solution. The sensor designs are fully optimized using mechanical and EM modeling for specific metrology needs. We discuss briefly on various electronic architectures and their impacts on the maintainability of the system. We conclude the paper by showing the experimental results.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bruno Luong, Bruno Luong, Christian Néel, Christian Néel, Ambroise Périn, Ambroise Périn, Didier Rozière, Didier Rozière, } "Inductive sensors for controlling segmented mirrors: a full industrial and turnkey product solution", Proc. SPIE 7733, Ground-based and Airborne Telescopes III, 77332D (12 August 2010); doi: 10.1117/12.856406; https://doi.org/10.1117/12.856406
PROCEEDINGS
13 PAGES


SHARE
Back to Top