20 July 2010 Interpixel crosstalk in a 3D-integrated active pixel sensor for x-ray detection
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Abstract
MIT Lincoln Laboratories and MIT Kavli Institute for Astrophysics and Space Research have developed an active pixel sensor for use as a photon counting device for imaging spectroscopy in the soft X-ray band. A silicon-on-insulator (SOI) readout circuit was integrated with a high-resistivity silicon diode detector array using a per-pixel 3D integration technique developed at Lincoln Laboratory. We have tested these devices at 5.9 keV and 1.5 keV. Here we examine the interpixel cross-talk measured with 5.9 keV X-rays.
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Beverly LaMarr, Beverly LaMarr, Mark Bautz, Mark Bautz, Rick Foster, Rick Foster, Steve Kissel, Steve Kissel, Gregory Prigozhin, Gregory Prigozhin, Vyshnavi Suntharalingam, Vyshnavi Suntharalingam, } "Interpixel crosstalk in a 3D-integrated active pixel sensor for x-ray detection", Proc. SPIE 7742, High Energy, Optical, and Infrared Detectors for Astronomy IV, 77422B (20 July 2010); doi: 10.1117/12.857137; https://doi.org/10.1117/12.857137
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