Nanometer scale imaging with table top extreme ultraviolet sources

Przemyslaw W. Wachulak; Richard L. Sandberg; Artak Isoyan; Lukasz Urbanski; Andrzej Bartnik; Randy A. Bartels; Carmen S. Menoni; Henryk Fiedorowicz; Jorge J. Rocca; Mario C. Marconi

doi:10.1117/12.880340

14 December 2010 Nanometer scale imaging with table top extreme ultraviolet sources

Przemyslaw W. Wachulak, Richard L. Sandberg, Artak Isoyan, Lukasz Urbanski, Andrzej Bartnik, Randy A. Bartels, Carmen S. Menoni, Henryk Fiedorowicz, Jorge J. Rocca, Mario C. Marconi

Author Affiliations +

Proceedings Volume 7746, 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 774609 (2010) https://doi.org/10.1117/12.880340
Event: 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2010, Liptovsky Jan, Slovakia

Abstract

Decreasing the illumination wavelength allows to improve the spatial resolution in photon-based imaging systems and enables a nanometer-scale spatial resolution. Due to a significant interest in nanometer-scale spatial resolution imaging short wavelengths from extreme ultraviolet (EUV) region are often used. A few examples of various imaging techniques, such as holography, zone plate EUV microscopy, computer generated hologram EUV reconstruction, lens-less diffraction imaging and generalized Talbot self-imaging will be presented utilizing coherent and incoherent EUV sources. Some of these EUV imaging techniques lead to the high spatial resolution, better than 50nm in a very short exposure time. The techniques, presented herein, have potential to be used in actinic mask inspection for EUV lithography, mask-less lithographic processes in the nanofabrication, in material science or biology.

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Przemyslaw W. Wachulak, Richard L. Sandberg, Artak Isoyan, Lukasz Urbanski, Andrzej Bartnik, Randy A. Bartels, Carmen S. Menoni, Henryk Fiedorowicz, Jorge J. Rocca, and Mario C. Marconi "Nanometer scale imaging with table top extreme ultraviolet sources", Proc. SPIE 7746, 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 774609 (14 December 2010); https://doi.org/10.1117/12.880340

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