14 December 2010 Nanometer scale imaging with table top extreme ultraviolet sources
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Proceedings Volume 7746, 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 774609 (2010) https://doi.org/10.1117/12.880340
Event: 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2010, Liptovsky Jan, Slovakia
Abstract
Decreasing the illumination wavelength allows to improve the spatial resolution in photon-based imaging systems and enables a nanometer-scale spatial resolution. Due to a significant interest in nanometer-scale spatial resolution imaging short wavelengths from extreme ultraviolet (EUV) region are often used. A few examples of various imaging techniques, such as holography, zone plate EUV microscopy, computer generated hologram EUV reconstruction, lens-less diffraction imaging and generalized Talbot self-imaging will be presented utilizing coherent and incoherent EUV sources. Some of these EUV imaging techniques lead to the high spatial resolution, better than 50nm in a very short exposure time. The techniques, presented herein, have potential to be used in actinic mask inspection for EUV lithography, mask-less lithographic processes in the nanofabrication, in material science or biology.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Przemyslaw W. Wachulak, Przemyslaw W. Wachulak, Richard L. Sandberg, Richard L. Sandberg, Artak Isoyan, Artak Isoyan, Lukasz Urbanski, Lukasz Urbanski, Andrzej Bartnik, Andrzej Bartnik, Randy A. Bartels, Randy A. Bartels, Carmen S. Menoni, Carmen S. Menoni, Henryk Fiedorowicz, Henryk Fiedorowicz, Jorge J. Rocca, Jorge J. Rocca, Mario C. Marconi, Mario C. Marconi, } "Nanometer scale imaging with table top extreme ultraviolet sources", Proc. SPIE 7746, 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 774609 (14 December 2010); doi: 10.1117/12.880340; https://doi.org/10.1117/12.880340
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