14 December 2010 The regular lattice of optical vortices used for measurement in two angular and one linear degree of freedom
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Proceedings Volume 7746, 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 77460A (2010) https://doi.org/10.1117/12.881752
Event: 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2010, Liptovsky Jan, Slovakia
Abstract
In this paper authors present the method for measurement of micro displacements along optical axis of the reflective object. Three separate focused beams are used in those measurements. Those three plane waves are reflected by examined object surface and their interference tends to create regular lattice of the optical vortices. In this paper authors present test results of sensitivity of an actual measurement system.
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Ewa Fraczek, Filip Rus, Janusz Mroczka, "The regular lattice of optical vortices used for measurement in two angular and one linear degree of freedom", Proc. SPIE 7746, 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 77460A (14 December 2010); doi: 10.1117/12.881752; https://doi.org/10.1117/12.881752
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