Efficient OASIS.MASK reader

Domingo Morales; Juan Pablo Canepa; Daniel Cohen

doi:10.1117/12.866029

26 May 2010 Efficient OASIS.MASK reader

Domingo Morales, Juan Pablo Canepa, Daniel Cohen

Author Affiliations +

Proceedings Volume 7748, Photomask and Next-Generation Lithography Mask Technology XVII; 77481O (2010) https://doi.org/10.1117/12.866029
Event: Photomask and NGL Mask Technology XVII, 2010, Yokohama, Japan

Abstract

OASIS (P39) specification imposes few restrictions on file structure and does not enforce the use of standard properties and features such as strict mode. As a natural consequence, P39 readers must be general enough to cover all possible types of input, and this leads to inefficiencies. In contrast, OASIS.MASK (P44) specification, which is a formal subset of P39, has restrictions on file structure and enforces the usage of properties, both standard and user mandatory ones. In addition to this, strict mode is mandatory and new features like Localization are added. Even though it is possible to read a P44 file using general P39 readers, such readers do not take advantage of the special P44 characteristics and therefore remain inefficient, especially for applications needing fast random access to arbitrary extents of data within the file. In this paper we explain the concepts that should be considered in the design of an efficient P44 reader and present Synopsys CATS^R implementation. Experimental results comparing CATS^R P44 specific reader against standard P39 readers show significant performance benefits.

Citation Download Citation

Domingo Morales, Juan Pablo Canepa, and Daniel Cohen "Efficient OASIS.MASK reader", Proc. SPIE 7748, Photomask and Next-Generation Lithography Mask Technology XVII, 77481O (26 May 2010); https://doi.org/10.1117/12.866029

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