Paper
22 September 2010 Fabrication and mechanical properties of surface plasmon waveguide biosensors on thin CYTOP membranes
Author Affiliations +
Proceedings Volume 7750, Photonics North 2010; 77502J (2010) https://doi.org/10.1117/12.872013
Event: Photonics North 2010, 2010, Niagara Falls, Canada
Abstract
A Long Range Surface Plasmon Polariton (LRSPP) gold waveguide supported by a thin suspended CYTOP membrane is discussed with respect to biosensing applications. This structure allows for refractive index symmetry through immersion in liquid or gaseous environments. The amorphous fluoropolymer CYTOP is used for the membrane material due to its desirable optical properties. The fabrication steps for the membranes and waveguides are described along with the membranes' mechanical properties determined experimentally through bulge testing. These structures are promising for applications in biological and chemical sensing.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Norman Fong, Pierre Berini, and R. Niall Tait "Fabrication and mechanical properties of surface plasmon waveguide biosensors on thin CYTOP membranes", Proc. SPIE 7750, Photonics North 2010, 77502J (22 September 2010); https://doi.org/10.1117/12.872013
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KEYWORDS
Waveguides

Silicon

Semiconducting wafers

Gold

Silicon films

Thin films

Biosensing

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