17 May 2011 Fiber-optic Fabry-Perot interferometer tip accelerometer fabricated by laser-micromachining
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Proceedings Volume 7753, 21st International Conference on Optical Fiber Sensors; 775318 (2011) https://doi.org/10.1117/12.884922
Event: 21st International Conference on Optical Fibre Sensors (OFS21), 2011, Ottawa, Canada
Abstract
A novel fiber-optic tip accelerometer based on Fabry-Perot (F-P) interferometer is proposed and demonstrated, with potential to operate under high temperature, in this paper. Such a tip accelerometer is directed fabricated on a large cladding fiber end by using the 157nm laser-micromachining technology. With the calibration of a micro electro mechanical systems (MEMS) accelerometer, the sensitivity of such a fiber-optic F-P accelerometer is 1.764 rad/g. The minimum detective acceleration is estimated to be 20μg.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zengling Ran, Zengling Ran, En Lu, En Lu, Yunjiang Rao, Yunjiang Rao, Min Ni, Min Ni, Fei Peng, Fei Peng, Dehong Zeng, Dehong Zeng, } "Fiber-optic Fabry-Perot interferometer tip accelerometer fabricated by laser-micromachining", Proc. SPIE 7753, 21st International Conference on Optical Fiber Sensors, 775318 (17 May 2011); doi: 10.1117/12.884922; https://doi.org/10.1117/12.884922
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