17 May 2011 Optical characterisation of RF sputter coated palladium thin films for hydrogen sensing
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Proceedings Volume 7753, 21st International Conference on Optical Fiber Sensors; 77535T (2011) https://doi.org/10.1117/12.886057
Event: 21st International Conference on Optical Fibre Sensors (OFS21), 2011, Ottawa, Canada
Abstract
We investigate the optical properties of Pd thin films of the thickness 20-100nm deposited on Si wafer via RF sputter coating. The Pd samples are characterised using white light interfermometry for thickness and ellipsometry for refractive index. We demonstrate the independence of refractive index on film thickness above 20nm. Considerable discrepancy is found between our measurement and previously published complex refractive indices for both bulk and RF sputter coated Pd, indicating a high degree of dependence on deposition technique.
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Richard M Carter, Richard M Carter, Peter Morrall, Peter Morrall, Robert R. J. Maier, Robert R. J. Maier, Benjamin J. S. Jones, Benjamin J. S. Jones, Scott McCulloch, Scott McCulloch, James S. Barton, James S. Barton, } "Optical characterisation of RF sputter coated palladium thin films for hydrogen sensing", Proc. SPIE 7753, 21st International Conference on Optical Fiber Sensors, 77535T (17 May 2011); doi: 10.1117/12.886057; https://doi.org/10.1117/12.886057
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