Fabrication of microstructures on nickel alloy by DPSS laser ablation technique for lab-on-chip applications

Qiuping Chen; Qiuling Chen; Gabriele Maccioni; Sergio Ferrero; Luciano Scaltrito; Adriano Sacco

doi:10.1117/12.859992

27 August 2010 Fabrication of microstructures on nickel alloy by DPSS laser ablation technique for lab-on-chip applications

Qiuping Chen, Qiuling Chen, Gabriele Maccioni, Sergio Ferrero, Luciano Scaltrito, Adriano Sacco

Author Affiliations +

Proceedings Volume 7762, Optical Trapping and Optical Micromanipulation VII; 776239 (2010) https://doi.org/10.1117/12.859992
Event: SPIE NanoScience + Engineering, 2010, San Diego, California, United States

Abstract

A novel technique for the fabrication of micro-structures on Ni-alloy by DPSS laser ablation was studied and reported in this paper. Using a q-switched Nd:YVO4 laser, a Ni alloy was micro-machined without lithography-based technologies. The effects of various process parameters such as working power, laser frequency, scan speed and number of scan were examined during laser processing. The removal of debris during ablation was also studied, and performed under vacuum conditions. The obtained prototype was tested by optical microscopy, Scanning Electron Microscopy, EDX and 3D microprofilometer. The obtained structured nickel alloy can be used as master for imprinting on glass substrates for lab-on-chip applications.

Citation Download Citation

Qiuping Chen, Qiuling Chen, Gabriele Maccioni, Sergio Ferrero, Luciano Scaltrito, and Adriano Sacco "Fabrication of microstructures on nickel alloy by DPSS laser ablation technique for lab-on-chip applications", Proc. SPIE 7762, Optical Trapping and Optical Micromanipulation VII, 776239 (27 August 2010); https://doi.org/10.1117/12.859992

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available