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27 August 2010 Fabrication of microstructures on nickel alloy by DPSS laser ablation technique for lab-on-chip applications
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Abstract
A novel technique for the fabrication of micro-structures on Ni-alloy by DPSS laser ablation was studied and reported in this paper. Using a q-switched Nd:YVO4 laser, a Ni alloy was micro-machined without lithography-based technologies. The effects of various process parameters such as working power, laser frequency, scan speed and number of scan were examined during laser processing. The removal of debris during ablation was also studied, and performed under vacuum conditions. The obtained prototype was tested by optical microscopy, Scanning Electron Microscopy, EDX and 3D microprofilometer. The obtained structured nickel alloy can be used as master for imprinting on glass substrates for lab-on-chip applications.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qiuping Chen, Qiuling Chen, Gabriele Maccioni, Sergio Ferrero, Luciano Scaltrito, and Adriano Sacco "Fabrication of microstructures on nickel alloy by DPSS laser ablation technique for lab-on-chip applications", Proc. SPIE 7762, Optical Trapping and Optical Micromanipulation VII, 776239 (27 August 2010); https://doi.org/10.1117/12.859992
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