Non-contact stiffness measurement of a suspended single walled carbon nanotube devices

Yun Zheng; Chanmin Su; Stephanie Getty

doi:10.1117/12.861289

27 August 2010 Non-contact stiffness measurement of a suspended single walled carbon nanotube devices

Yun Zheng, Chanmin Su, Stephanie Getty

Proceedings Volume 7764, Nanoengineering: Fabrication, Properties, Optics, and Devices VII; 77640K (2010) https://doi.org/10.1117/12.861289
Event: SPIE NanoScience + Engineering, 2010, San Diego, California, United States

Abstract

A new nanoscale electric field sensor was developed for studying triboelectric charging in terrestrial and Martian dust devils. This sensor is capable to measure the large electric fields for large dust devils without saturation. However, to quantify the electric charges and the field strength it is critical to calibrate the mechanical stiffness of the sensor devices. We performed a technical feasibility study of the Nano E-field Sensor stiffness by a non-contact stiffness measurement method. The measurement is based on laser Doppler vibrometer measurement of the thermal noise due to energy flunctuations in the devices. The experiment method provides a novel approach to acquire data that is essential in analyzing the quantitative performance of the E-field Nano Sensor. To carry out the non-contact stiffness measurement, we fabricated a new Single-Walled Carbon Nanotube (SWCNT) E-field sensor with different SWCNTs suspension conditions. The power spectra of the thermal induced displacement in the nano E-field sensor were measured at the accuracy of picometer. The power spectra were then used to derive the mechanical stiffness of the sensors. Effect of suspension conditions on stiffness and sensor sensitivty was discussed. After combined deformation and resistivity measurement, we can compare with our laboratory testing and field testing results. This new non-contact measurement technology can also help to explore to other nano and MEMS devices in the future.

Citation Download Citation

Yun Zheng, Chanmin Su, and Stephanie Getty "Non-contact stiffness measurement of a suspended single walled carbon nanotube devices", Proc. SPIE 7764, Nanoengineering: Fabrication, Properties, Optics, and Devices VII, 77640K (27 August 2010); https://doi.org/10.1117/12.861289

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KEYWORDS

Electric field sensors

Sensors

Single walled carbon nanotubes

Gold

Silicon

Microelectromechanical systems

Electrodes

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