24 August 2010 Development of a high-speed profilometer for manufacturing inspection
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Abstract
Optical digital-imaging techniques offer a fast, high-resolution, and wide-range metrology capability for measuring semi-transparent and transparent polymer-based devices during manufacture. This work presents novel instrumentation for in-process statistical control and metrology capable of measuring a complete macroscale part (~25 mm) down to its microscale features (~50 μm). The high speed 2.5D profilometer has generated contour plots with 0.4 μm lateral and 1 μm vertical resolution. The instrument has an estimated data rate of 8 million 3D data points per second, approximately 270 times faster than conventional white light interferometry.
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Dean M. Ljubicic, Brian Anthony, "Development of a high-speed profilometer for manufacturing inspection", Proc. SPIE 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV, 776705 (24 August 2010); doi: 10.1117/12.860166; https://doi.org/10.1117/12.860166
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