24 August 2010 Multipurpose instrument calibration standard for particle beam, scanned probe and optical microscopy: NIST reference material (RM) 8820
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Abstract
NIST has introduced a new standard for dimensional metrology and the calibration of the scanning electron microscope (SEM) scale identifi ed as Reference Material (RM) 8820. RM 8820 was primarily intended to be used for calibrating the X and Y scale (or magnifi cation) in SEMs but, can be used for an many other purposes. Essentially, all laboratory microscopes can be calibrated to this same artifact. The NIST pattern is only one part of a very large array of test structures that were designed for various dimensional metrology purposes useful to semiconductor production technologies. These and other purposes, discussed in the presentation, RM 8820 can also be used on/in any other type of microscope, such as optical and scanning probe microscopes and for scatterometry measurements.
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Michael T. Postek, András E. Vladar, William Keery, Michael Bishop, Benjamin Bunday, John Allgair, "Multipurpose instrument calibration standard for particle beam, scanned probe and optical microscopy: NIST reference material (RM) 8820", Proc. SPIE 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV, 77670D (24 August 2010); doi: 10.1117/12.861595; https://doi.org/10.1117/12.861595
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