Oxygen Ion Cleaning Of Organic Contaminant Films

T. J. Deguchi; C. B. Kalem

doi:10.1117/12.967095

1 January 1987 Oxygen Ion Cleaning Of Organic Contaminant Films

T. J. Deguchi, C. B. Kalem

Proceedings Volume 0777, Optical Systems Contamination: Effects, Measurement, Control; (1987) https://doi.org/10.1117/12.967095
Event: 1987 Technical Symposium Southeast on Optics, Electro-Optics, and Sensors, 1987, Orlando, FL, United States

Abstract

The feasibility of using low energy (<30 eV) oxygen ions to clean optics has been demonstrated, It was found that the removal rate of a hydrocarbon film is between.10-23 and 10-24 cm /ion. These rates imply that a one meter diameter optic with a 1000 Å layer of organic contaminant can be cleaned with 10 mole (0.32 milligram) of oxygen impinging on the surface. The removal rate varied with the thickness of the film; the lower layers of the film were more difficult to remove than the outer layers. The effect of the ions on the scatter of a gold mirror was also studied. It was determined that the ions increased the scatter by less than a factor of two.

Citation Download Citation

T. J. Deguchi and C. B. Kalem "Oxygen Ion Cleaning Of Organic Contaminant Films", Proc. SPIE 0777, Optical Systems Contamination: Effects, Measurement, Control, (1 January 1987); https://doi.org/10.1117/12.967095

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available